We have developed a scanning chemical microscope which enables the obs
ervation of a microscopic pH distribution to be made. With this micros
cope, a flat pH sensor made of silicon is functionally divided into mi
croscopic multiple-measurement points, then, the pH of the electrolyte
at each point is independently measured. The measured pH values are c
onverted to a gray or color scale so that the pH distribution can be v
isualized. The measurement can be performed with a resolution down to
0.1 pH at spatial intervals of as little as 100 microns. The measureme
nt time required for scanning 6.4 mm x 6.4 mm is 30s. Using this micro
scope we could obtain pH images showing the generation and expansion o
f a localized lower pH region due to the release of protons from a sin
gle cation-exchange resin particle placed on an agar electrolyte. The
dependence of the expansion rate on the agar concentration was clearly
observed. This microscope is expected to become one of the promising
techniques of chemical imaging.