ULTRASONIC SURFACE-WAVES FOR STUDYING THE PROPERTIES OF THIN-FILMS

Authors
KUCHLER R RICHTER E
Citation
R. Kuchler et E. Richter, ULTRASONIC SURFACE-WAVES FOR STUDYING THE PROPERTIES OF THIN-FILMS, Thin solid films, 315(1-2), 1998, pp. 29-34
Citations number
11
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
315
Issue
1-2
Year of publication
1998
Pages
29 - 34
Database
ISI
SICI code
0040-6090(1998)315:1-2<29:USFSTP>2.0.ZU;2-U
Abstract
The change of the spreading velocity of ultrasonic surface waves by th in film deposition is described by an approximation of the nonlinear e quations of motion. The effect of residual stress in deposited films o n the spreading velocity is considered. As an example for practical ap plications, the velocity change of surface waves after TiN-film deposi tion on steel bars is investigated. (C) 1998 Elsevier Science S.A.