NEW METHOD FOR INTERFEROMETRIC MEASUREMENT OF GAUGE BLOCKS WITHOUT WRINGING ONTO A PLATEN

Authors
Citation
Y. Ishii et S. Seino, NEW METHOD FOR INTERFEROMETRIC MEASUREMENT OF GAUGE BLOCKS WITHOUT WRINGING ONTO A PLATEN, Metrologia, 35(2), 1998, pp. 67-73
Citations number
10
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
ISSN journal
00261394
Volume
35
Issue
2
Year of publication
1998
Pages
67 - 73
Database
ISI
SICI code
0026-1394(1998)35:2<67:NMFIMO>2.0.ZU;2-5
Abstract
A new method, using a novel double-ended interferometer, is described for the highly efficient calibration of gauge blocks. Unlike the conve ntional Kosters interferometric method, the new method does not requir e wringing of the gauge block onto an auxiliary platen. Although the g auge block length defined by International Standard 3650 (Gauge blocks ) can be obtained using the Kosters method, the wringing operation is a laborious process, which requires skill, sometimes causes contact er rors and decreases measuring efficiency, and prevents a fully automate d measuring operation. The new interferometer can also be used as a co nventional Kosters interferometer by changing some of the optical syst ems. Thus, after preliminary investigations measuring some samples usi ng the Kosters method, we can determine an accurate correction value, dependent on the phase shift of light at the reflecting surface, to ob tain the gauge block length defined by ISO 3650. The results, obtained from experimental work and theoretical analysis, show that the combin ed standard uncertainty of a gauge block length up to 100 mm is less t han 16 nm, and this value is nearly the same as that obtained by the c onventional Kosters method.