INTERACTION OF GASE WITH GAAS(111) - FORMATION OF HETEROSTRUCTURES WITH LARGE LATTICE MISMATCH

Citation
Le. Rumaner et al., INTERACTION OF GASE WITH GAAS(111) - FORMATION OF HETEROSTRUCTURES WITH LARGE LATTICE MISMATCH, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(3), 1998, pp. 977-988
Citations number
54
Categorie Soggetti
Physics, Applied","Engineering, Eletrical & Electronic
ISSN journal
10711023
Volume
16
Issue
3
Year of publication
1998
Pages
977 - 988
Database
ISI
SICI code
1071-1023(1998)16:3<977:IOGWG->2.0.ZU;2-D
Abstract
We have studied the epitaxial growth of GaSe, a layered van der Waals material, on GaAs, a zinc-blende-structure semiconductor. This heteros tructure exhibits a 6% lattice mismatch, and is a prototypical example of van der Waals epitaxy, where the weak van der Waals interaction al lows the misfit to be accommodated without the formation of electronic ally active defects. GaSe was supplied to the growing surface from a s ingle GaSe Knudsen cell. Reflection high energy electron diffraction a nd x-ray photoemission spectroscopy studies of the nucleation of GaSe indicate Se reacts with the GaAs surface to remove the surface danglin g bonds prior to GaSe formation. This is followed by the oriented grow th of stoichiometric GaSe layers, that are rotationally aligned with t he underlying GaAs substrate. The termination of the GaAs dangling bon ds most likely occurs by Se substitution for As in the surface layer o f GaAs(lll) B and by direct bonding of Se to surface Ga on GaAs(lll) A surfaces. In addition, photoemission measurements indicate that the s ubsurface Se uptake into the GaAs(lll) A lattice is higher than that i n the (111) B lattice. (C) 1998 American Vacuum Society.