MICROELECTRONICS AND NANOMETER STRUCTURES - PROCESSING, MEASUREMENT, AND PHENOMENA - PREFACE

Authors
PEARSALL TP EVANGELISTI F
Citation
Tp. Pearsall et F. Evangelisti, MICROELECTRONICS AND NANOMETER STRUCTURES - PROCESSING, MEASUREMENT, AND PHENOMENA - PREFACE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(3), 1998, pp. 1515-1515
Citations number
NO
Categorie Soggetti
Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
16
Issue
3
Year of publication
1998
Pages
1515 - 1515
Database
ISI
SICI code
1071-1023(1998)16:3<1515:MANS-P>2.0.ZU;2-Z