J. Takano et al., SIMULATION OF ATOMIC-SCALE SURFACE MIGRATION IN HOMOEPITAXIAL GROWTH USING EMBEDDED-ATOM METHOD POTENTIALS FOR GOLD, Thin solid films, 318(1-2), 1998, pp. 52-56
Surface adsorption and surface diffusion are simulated by use of molec
ular dynamics method and N-body embedded-atom method (EAM) potential f
or gold. The relation between the growth rate of thin films and the pa
cking density of atoms using Monte Carlo simulation is obtained. The r
esults of the molecular dynamics method and the Monte Carlo method wer
e combined, so that the growth process of thin films at elevated tempe
ratures, which is too long to calculate, can be studied. (C) 1998 Else
vier Science S.A.