STRUCTURE CHARACTERIZATION OF METALLIC MULTILAYERS BY SYMMETRICAL ANDASYMMETRIC X-RAY-DIFFRACTION

Results of the structure characterization of Au/Ni multilayers are pre sented. The analysis is based on symmetric and asymmetric X-ray diffra ction (XRD). Particular attention is paid to interplanar distances and composition profiles of studied multilayers. Symmetric XRD profiles a re interpreted using the model of non-ideal superlattice structure bas ed on a Monte Carlo simulation. The model allows to fit experimental p rofiles starting within a wide range of interplanar distances and avoi ding any local minima. Asymmetric XRD measurements were performed for different hkl reflections. A stress analysis was done using sin(2)Psi method. Both asymmetric and symmetric XRD measurements confirm that pe rpendicular interplanar distances in Au and Ni are larger than the bul k ones. These interplanar distances are discussed in terms of a stress free lattice parameter and a strained one. (C) 1998 Elsevier Science S.A.