We present an analytical transmission electron microscopy (TEM, EDX mi
croanalysis) study of cobalt clusters embedded in amorphous alumina th
in films. We derived the size (average and standard deviation) and the
density of clusters from the quantitative analysis of images taken at
different defocus values. We additionally measured the cobalt/aluminu
m ratio by EDX and deduced the density of the amorphous alumina from t
he comparison of these results with thickness data. (C) 1998 Elsevier
Science S.A.