The growth of YBa2Cu3O7-x thin films deposited by sputtering onto (111
) SrTiO3 substrates at different temperatures, T-s, was studied by X-r
ay diffraction and HRTEM measurements. At all T-s values, the films gr
ow epitaxially (113) oriented. Ar low T-s, the growth is pseudomorphic
and homogeneously strained. At high T-s, strain is released probably
by defect incorporation leading to broad mosaic distributions. In the
intermediate T-s range, internal strain is accumulated in the films. T
hree domain orientations tilted by 120 degrees were observed in the fi
lm plane. Superconductivity with maximum T-c values of 84 K was only o
bserved in films prepared at high T-s revealing the orthorhombic struc
ture. The oxygenation of the films is probably strain-controlled. (C)
1998 Elsevier Science S.A.