Authors
Citation
B. Ratier et al., ION-BEAM APPLICATIONS IN POLYMER PHYSICS, Journal de chimie physique et de physico-chimie biologique, 95(6), 1998, pp. 1479-1482
Citations number
8
Categorie Soggetti
Biology,"Chemistry Physical
Journal title
Volume
95
Issue
6
Year of publication
1998
Pages
1479 - 1482
Database
ISI
SICI code
Abstract
Experimental configurations of ion beams are illustrated by diagrams i
n the case of low energy implantation, Reactive Ion Beam Etching (RIBE
), Ion Beam Assisted Deposition (IBAD) of molecular layers (or oligome
rs).