Ht. Chiu et al., SYNTHESES AND CHARACTERIZATION OF ORGANOIMIDO COMPLEXES OF TANTALUM -POTENTIAL SINGLE-SOURCE PRECURSORS TO TANTALUM NITRIDE, Polyhedron, 17(13-14), 1998, pp. 2187-2190
New single-source precursor to tantalum nitride thin films, ((BuN)-N-t
)Ta(NEt2)(3), and related complexes, (RN)Ta(NEt2)(3) (R = Pr-i and Pr-
n), were prepared by reacting corresponding (RN)TaCl(3)py(2) complexes
(R = Bu-t, Pr-i and Pr-n) with LiNEt2 in hydrocarbon solvents. The st
ructure of ((BuN)-N-t)TaCl(3)py(2) was determined by X-ray crystallogr
aphy. (C) 1998 Elsevier-Science Ltd. All rights reserved.