SYNTHESES AND CHARACTERIZATION OF ORGANOIMIDO COMPLEXES OF TANTALUM -POTENTIAL SINGLE-SOURCE PRECURSORS TO TANTALUM NITRIDE

Authors
CHIU HT CHUANG SH TSAI CE LEE GH PENG SM
Citation
Ht. Chiu et al., SYNTHESES AND CHARACTERIZATION OF ORGANOIMIDO COMPLEXES OF TANTALUM -POTENTIAL SINGLE-SOURCE PRECURSORS TO TANTALUM NITRIDE, Polyhedron, 17(13-14), 1998, pp. 2187-2190
Citations number
16
Categorie Soggetti
Chemistry Inorganic & Nuclear",Crystallography
Journal title
Polyhedron → ACNP
ISSN journal
02775387
Volume
17
Issue
13-14
Year of publication
1998
Pages
2187 - 2190
Database
ISI
SICI code
0277-5387(1998)17:13-14<2187:SACOOC>2.0.ZU;2-Z
Abstract
New single-source precursor to tantalum nitride thin films, ((BuN)-N-t )Ta(NEt2)(3), and related complexes, (RN)Ta(NEt2)(3) (R = Pr-i and Pr- n), were prepared by reacting corresponding (RN)TaCl(3)py(2) complexes (R = Bu-t, Pr-i and Pr-n) with LiNEt2 in hydrocarbon solvents. The st ructure of ((BuN)-N-t)TaCl(3)py(2) was determined by X-ray crystallogr aphy. (C) 1998 Elsevier-Science Ltd. All rights reserved.