A SPUTTERING CALCULATION - ANGULAR-DEPENDENCE OF SPUTTERING YIELDS

The material erosion induced by physical sputtering resulted from bomb ardments of hydrogen, helium and their isotopes is a critical problem for fusion technique. An important feature for such ion-induced sputte ring is isotropic incidence condition. Therefore it is necessary to de velop a sputtering theory which can be applied to the case of obliquel y incident ion beams. The sputtering theory based on the bipartition m odel of ion transport has recently extended to treat the problem of sp uttering calculation for the case of obliquely incident ion beam. In t he present paper some calculation results have been given out. Compari son shows that the angular dependence of sputtering yields given by th e bipartition model is in reasonable agreement with that given by TRIM -SP Monte Carlo code and experimental measurements. (C) 1998 Elsevier Science B.V.