DAMAGE BEHAVIORS IN LINBO3 CRYSTALS INDUCED BY MEV AU+ IRRADIATION

MeV Au+ ions were implanted into LiNbO3 with different fluences rangin g from 4 x 10(13) to 5 x 10(14) ions cm(-2) at room temperature. In or der to investigate the influence of angle of incidence and cut directi on of crystal on the damage profile, MeV Au+ irradiation in LiNbO3 was performed under different angles: 7 degrees, 45 degrees and 60 degree s with different cut directions: y-cut and z-cut. The damage behaviour was studied by the Rutherford backscattering (RBS)/channelling techni que. A dechannelling analysis of multiple scattering has been made. Th e extracted damage profile is compared with the TRIM (Transport of Ion s in Matter) prediction. The effect of the fluence, ion irradiation an gle and crystal cut direction on the damage profile is discussed. (C) 1998 Elsevier Science B.V.