STOPPING CROSS-SECTION MEASUREMENTS OF TI THIN-FILMS

Authors
CLIMENTFONT A RAISANEN J RAUHALA E
Citation
A. Climentfont et al., STOPPING CROSS-SECTION MEASUREMENTS OF TI THIN-FILMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 138, 1998, pp. 109-113
Citations number
11
Categorie Soggetti
Instument & Instrumentation","Nuclear Sciences & Tecnology","Physics, Atomic, Molecular & Chemical","Physics, Nuclear
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
138
Year of publication
1998
Pages
109 - 113
Database
ISI
SICI code
0168-583X(1998)138:<109:SCMOTT>2.0.ZU;2-Y
Abstract
The stopping cross section for He-4 projectiles of Ti thin films have been measured with the backscattering method using a multi-compound ma rker layer deposited between the test film and the substrate. Problems derived from the nonuniformity of the marker layer as well as corruga tions of the films under test have been solved with the help of a comp uter code to synthesize Rutherford Backscattering Spectrometry (RBS) s pectra. Stopping cross section values are obtained with an estimated u ncertainty of 4%. (C) 1998 Elsevier Science B.V.