CHANNELING AND LOW-ENERGY-ELECTRON INDUCED X-RAY SPECTROSCOPY ON NEONIMPLANTED BERYLLIUM SINGLE-CRYSTAL

Using the Rutherford Backscattering Spectrometry-Channelling (RBS-C) m ethod which is able to provide information on the lattice location of the implanted atoms, we have tried to show that when neon is implanted into metals it has the same behaviour as other heavier noble gases. T he work has been divided in two Darts. First we had to settle the neon implanted dose to obtain solid inclusions without destroying the crys tallinity of the matrix. This information was obtained by measuring th e pressure in the bubbles by means of soft X-ray emission spectroscopy : the broadening of the neon K-alpha X-ray line shows the existence of a band structure correlated with the shear modulus of the implanted m etal and the pressure of the implanted neon. From these results it app ears that beryllium is a good candidate for channelling measurements w hen it is implanted in doses as low as 10(16)Ne/cm(2). The second part of the work contains RBS-C measurements along the < 0 0 0 1 > axial c hannel and the (0 1 (1) over bar 0), (1 (2) over bar 1 0) and planar c hannel, the results seem to indicate that the solid neon inclusions ar e platelets aligned with the (0 0 0 1) plane. Investigations with TEM are in progress to confirm the results. (C) 1998 Elsevier Science B.V.