ON ANOMALOUS CONCENTRATION DEPTH PROFILES OF ATOMS IMPLANTED INTO POLYMERS

Authors
HNATOWICZ V VACIK J CERVENA J PERINA V SVORCIK V RYBKA V
Citation
V. Hnatowicz et al., ON ANOMALOUS CONCENTRATION DEPTH PROFILES OF ATOMS IMPLANTED INTO POLYMERS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 138, 1998, pp. 568-573
Citations number
20
Categorie Soggetti
Instument & Instrumentation","Nuclear Sciences & Tecnology","Physics, Atomic, Molecular & Chemical","Physics, Nuclear
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
138
Year of publication
1998
Pages
568 - 573
Database
ISI
SICI code
0168-583X(1998)138:<568:OACDPO>2.0.ZU;2-B
Abstract
Different polymers were implanted with 50-200 keV heavy ions to fluenc es of greater than or equal to 1 x 10(15) cm(-2) and the concentration depth profiles of the implanted atoms were measured by standard Ruthe rford backscattering technique (RBS). The ex perimental projected rang es were found to he 10-30% lower than those estimated by the TRIM91 co de. The measured range stragglings, on the other hand, are by a factor of 1.4-2.4 higher than the calculated ones. The discrepancies are exp lained by the loss of matter juring the implantation process. (C) 1998 Elsevier Science B.V.