ION-BEAM ANALYSIS OF OXIDIZED A-C-D LAYERS ON BE - A COMPARISON OF HE-4 RBS AND SI-28 ERD ANALYSIS

Authors
ROTH J WALSH DS WAMPLER WR MAYER M
Citation
J. Roth et al., ION-BEAM ANALYSIS OF OXIDIZED A-C-D LAYERS ON BE - A COMPARISON OF HE-4 RBS AND SI-28 ERD ANALYSIS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 138, 1998, pp. 689-694
Citations number
23
Categorie Soggetti
Instument & Instrumentation","Nuclear Sciences & Tecnology","Physics, Atomic, Molecular & Chemical","Physics, Nuclear
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
138
Year of publication
1998
Pages
689 - 694
Database
ISI
SICI code
0168-583X(1998)138:<689:IAOOAL>2.0.ZU;2-P
Abstract
The composition of intermixed layers on Be containing H, D, Be, C and O has been analysed using conventional He-4 RES at 2.2 MeV together wi th 2.5 MeV He-4 ERD for hydrogen isotope analysis. The results are com pared with heavy ion ERD using 12-40 MeV Si incident ions and detectio n of recoils without mass separation. For the analysis of the RES and ERD data the newly developed spectra simulation program SIMNRA has bee n used. The advantages and disadvantages of both methods in respect to depth resolution, data analysis and radiation damage are discussed. ( C) 1998 Elsevier Science B.V.