CYCLOTRON-BASED HIGH-ENERGY ION CHANNELING

Ion channeling for materials analysis is usually carried out with He i on beam energies less than 3 MeV. The,AVF-cyclotron at Eindhoven Unive rsity of Technology allows the use of higher beam energies (3-30 MeV) which is of potential interest due to a high angular resolution, a lar ge analysable depth range and the application of nuclear reactions or resonant scattering cross-sections. In this paper the enhanced angular resolution for 12.6 MeV He ions is demonstrated by angular scans from a buried Si1-xGex layer. The enhanced analysable depth range is shown by quantitative defect depth profiling of a 4 mu m thick relaxed SiGe multilayer buffer. Finally, a study on vibrational amplitudes in bulk InP was carried out by a combination of channeling and nuclear reacti on analysis using the P-31(alpha,p)S-34 reaction. (C) 1998 Elsevier Sc ience B.V.