ION-BEAM-INDUCED STRUCTURAL TRANSFORMATIONS IN SIMGEN SUPERLATTICES

Authors
SOBOLEV NA GERSTER J MAUCKNER G WOLPERT M LIMMER W THONKE K SAUER R PRESTING H KONIG U
Citation
Na. Sobolev et al., ION-BEAM-INDUCED STRUCTURAL TRANSFORMATIONS IN SIMGEN SUPERLATTICES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 138, 1998, pp. 1057-1061
Citations number
18
Categorie Soggetti
Instument & Instrumentation","Nuclear Sciences & Tecnology","Physics, Atomic, Molecular & Chemical","Physics, Nuclear
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
138
Year of publication
1998
Pages
1057 - 1061
Database
ISI
SICI code
0168-583X(1998)138:<1057:ISTISS>2.0.ZU;2-1
Abstract
Si6Ge4 and Si9Ge6 superlattices (SLs) have been implanted with 100 keV Si+ and 150 keV Ar+ ions, respectively, and they have been subsequent ly annealed, Raman and low temperature photoluminescence (PL) spectra are measured. A total breakdown of the SL structure and a transformati on of the SLs into an alloy are observed in the course of annealing at temperatures much lower than those typical of the intermixing of as-g rowth SLs. The effect is explained by defect-enhanced diffusion. (C) 1 998 Elsevier Science B.V.