RBS-CHANNELING ANALYSIS OF VIRGIN 6H-SIC - EXPERIMENTS AND MONTE-CARLO SIMULATIONS

Authors
BIANCONI M ALBERTAZZI E CARNERA A LULLI G NIPOTI R SAMBO A
Citation
M. Bianconi et al., RBS-CHANNELING ANALYSIS OF VIRGIN 6H-SIC - EXPERIMENTS AND MONTE-CARLO SIMULATIONS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 138, 1998, pp. 1267-1271
Citations number
20
Categorie Soggetti
Instument & Instrumentation","Nuclear Sciences & Tecnology","Physics, Atomic, Molecular & Chemical","Physics, Nuclear
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
138
Year of publication
1998
Pages
1267 - 1271
Database
ISI
SICI code
0168-583X(1998)138:<1267:RAOV6->2.0.ZU;2-5
Abstract
The aim of this work is to define both the experimental procedures (ra ndom geometry and maximum beam fluence) and a set of reference paramet ers (minimum yield and amplitude of angular dips) to be used for the R utherford Backscattering Spectrometry channeling (RBS-channeling) anal ysis of (0001) 6H-SiC crystals. The [0001], (10 (1) over bar 0) and (1 1 (2) over bar 0) spectra and angular dips were simulated by a Monte C arlo (MC) computer code. The results were compared with the measuremen ts performed on good quality crystals grown by the Lely technique. (C) 1998 Elsevier Science B.V.