DEPTH RESOLUTION AND DYNAMIC-RANGE OF O-18(P,ALPHA)N-15 DEPTH PROFILING

This paper discusses an approach to get better depth resolution and th e 2-3 mu m dynamic range needed for diffusion studies of oxygen, using O-18(p,alpha)N-15 nuclear reaction analysis (NRA). This was achieved by optimizing the experimental parameters, and using fast electronics without the absorber in front. of the detector. By energy analysis of the alpha-particles, a depth resolution of 170 to 300 Angstrom was obt ained with the dynamic range varying from the surface to a depth of 3 mu m. Problems in data analysis, i.e., the cross sections and energy s traggling will be discussed. Examples in depth profiling of O-18-impla nted SrTiO3 single crystals and Yttrium stabilized zirconia (YSZ) sing le crystals annealed in O-18 at high temperature are presented. (C) 19 98 Elsevier Science B.V.