MEASUREMENT OF THE AMOUNT OF FREE AND BOUND HYDROGEN IN AMORPHOUS-CARBON

The effusion of hydrogen and other gases from an amorphous carbon a-C: H film annealed at temperatures of 100-1000 degrees C was studied. A d irect method was used to determine the amount of hydrogen in the mater ial as 26 at.%. The amount of free hydrogen was determined as 4 at.%. The temperature curve for the release of free hydrogen gas has a maxim um at 400 degrees C. A broad hydrogen effusion peak was observed above 400 degrees C. The amount of hydrogen released by breaking of weak C- H bonds was determined as 10 at.% and that released by breaking of str ong C-H bonds was determined as 12 at%. (C) 1997 American Institute of Physics. [S1063-7850(97)00101-8].