LOCALIZATION OF AN RF CAPACITIVE DISCHARGE IN A LONG STRIP LINE

Authors
RAIZER YP SCHNEIDER MN
Citation
Yp. Raizer et Mn. Schneider, LOCALIZATION OF AN RF CAPACITIVE DISCHARGE IN A LONG STRIP LINE, Technical physics letters, 23(1), 1997, pp. 75-77
Citations number
3
Journal title
Technical physics letters → ACNP
ISSN journal
10637850
Volume
23
Issue
1
Year of publication
1997
Pages
75 - 77
Database
ISI
SICI code
1063-7850(1997)23:1<75:LOARCD>2.0.ZU;2-F
Abstract
The self-consistent problem of a an intermediate-pressure rf capacitiv e discharge in a long strip line is analyzed with allowance for heatin g of the gas. Steady-state distributions of the discharge parameters a long the line are derived. It is shown that the discharge bums in cert ain regions, whose lengths and locations depend on the amplitude of th e applied voltage. (C) 1997 American Institute of Physics. [S1063-7850 (97)02601-3].