INVESTIGATION OF THE PROPERTIES OF CDO FILMS

Authors
BARANOV AM MALOV YA TERYOSHIN SA VALDNER VO
Citation
Am. Baranov et al., INVESTIGATION OF THE PROPERTIES OF CDO FILMS, Technical physics letters, 23(10), 1997, pp. 805-806
Citations number
7
Journal title
Technical physics letters → ACNP
ISSN journal
10637850
Volume
23
Issue
10
Year of publication
1997
Pages
805 - 806
Database
ISI
SICI code
1063-7850(1997)23:10<805:IOTPOC>2.0.ZU;2-B
Abstract
Cadmium oxide films obtained by magnetron sputtering of a cadmium targ et in a nitrogen-oxygen mixture are investigated. It is established th at these films have a lower resistivity than do films obtained by othe r methods. It is concluded that the practical utilization of CdO films as transparent electrodes would be worthwhile. (C) 1997 American Inst itute of Physics. [S1063-7850(97)02910-8].