Experimental results and theoretical concepts are reviewed for various
mechanisms of self-organization of quantum dot-based nanostructures o
n semiconductor surfaces, including formation of ordered structures of
two-dimensional islands, formation of single-sheet and multi-sheet ar
rays of three-dimensional islands in lattice-mismatched systems, and f
ormation of quantum dots via phase separation of unstable alloys. Long
-range elastic interaction is emphasized to be the common driving forc
e for the formation of both equilibrium structures and kinetically con
trolled structures. New results are reported on formation of quantum d
ots due to phase separation of alloys both during the growth and via p
ost-growth annealing. (C) 1998 Elsevier Science B.V. All rights reserv
ed.