FORMATION OF MULTILAYER STRAINED-LAYER HETEROSTRUCTURES BY LIQUID EPITAXY - I - THEORETICAL ASPECTS OF THE PROBLEM AND MATHEMATICAL-MODEL

Problems concerned with the formation of multilayer strained-layer het erostructures by ''capillary'' liquid-phase epitaxy with forced hydrau lic replacement of the solutions in the growth channel are analyzed. I t is shown for short contact times between the solutions and the cryst allization surface that the character of their flow in the channel pla ys an important role in the achievement of uniformity in the physical characteristics of the layers grown. Theoretical estimates of the hydr odynamic stability of solutions moving in narrow channels are performe d for several III-V systems. A mathematical model, which permits simul ation of the conditions under which strained-layer heterostructures ar e fabricated, is developed. It takes into account diffusive and convec tive mass transport in the liquid for various flow regimes in the capi llary and the displacement of the heterogeneous equilibria in the syst em under the influence of elastic stresses. (C) 1997 American Institut e of Physics. [S1063-7842(97)00907-0].