HIGH-RESOLUTION MINIATURIZED INDUCTIVE PROXIMITY SENSOR - CHARACTERIZATION AND APPLICATION FOR STEP-MOTOR CONTROL

Authors
PASSERAUB PA BESSE PA HEDIGER S DERAAD C POPOVIC RS
Citation
Pa. Passeraub et al., HIGH-RESOLUTION MINIATURIZED INDUCTIVE PROXIMITY SENSOR - CHARACTERIZATION AND APPLICATION FOR STEP-MOTOR CONTROL, Sensors and actuators. A, Physical, 68(1-3), 1998, pp. 257-262
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
68
Issue
1-3
Year of publication
1998
Pages
257 - 262
Database
ISI
SICI code
0924-4247(1998)68:1-3<257:HMIPS->2.0.ZU;2-B
Abstract
A resolution better than 50 nm has been achieved with a new miniaturiz ed inductive proximity sensor. This sensor microsystem is made of a 1 mm diameter coil connected to a new and highly sensitive ASIC based on a differential relaxation oscillator. Lateral as well as axial resolu tions have been characterized. A microsystem for step motor control wi th an accuracy better than 2 degrees is demonstrated. This application is not affected by the temperature behaviour of the sensor. (C) 1998 Elsevier Science S.A. All rights reserved.