ELECTROCHEMICAL STUDIES OF CARBON-FILMS FROM PYROLYZED PHOTORESIST

Carbon film electrodes were prepared by pyrolysis of photoresists on s ilicon-wafers at temperatures ranging from 600 to 1100 degrees C. The physical properties of the carbon films were characterized by scanning and transmission electron microscopies, thermal gravimetric analysis, and four-point probe electrical resistivity measurements. The electro chemical properties of the carbon films were investigated by cyclic vo ltammetry to observe the kinetics of the Fe(CN)(6)(4-)/Fe(CN)(6)(3-) r edox couple. The carbon film electrodes prepared at temperatures great er than or equal to 700 degrees C showed electrochemical behavior Simi lar to that of glassy carbon. Better electrocatalytic behavior was obt ained with carbon films prepared at the higher pyrolysis temperatures which is attributed to different film compositions at different pyroly sis temperatures. The electrochemical properties of the:carbon film el ectrodes are very stable, exhibiting reproducible behavior even after storing at room temperature in air for 3 months.