During growth of submonolayer films of Co on Cu(111) at 280 K, the sur
face is damaged by etching, leading to an increase in the interfacial
mixing and roughness. Bq means of a quantitative STM study, we analyze
the influence of the temperature of the substrate on this etching. Ou
r results for 18 ML of Co indicate that the etching rate is considerab
ly reduced by lowering the substrate temperature to 140 K during Co de
position only, The total etched area observed after annealing the film
to 300 K can be reduced by a factor of five, although the etching pro
cess continues at a much loa er rate. From the quantification of both
the etched area and the Cu content within terrace islands, we argue th
at the etching is basically due to the diffusion of Cu atoms out of th
e step-edges. Such a diffusion process, which is significantly diminis
hed at low temperature, takes place at the early stages of the growth,
i.e. during Co aggregation and island formation. (C) 1998 Elsevier Sc
ience B.V. All rights reserved.