H. Teterycz et al., NEW DESIGN OF AN SNO2 GAS SENSOR ON LOW-TEMPERATURE COFIRING CERAMICS, Sensors and actuators. B, Chemical, 47(1-3), 1998, pp. 100-103
A new design for thick film gas sensors was investigated. The sensors
were made by the low temperature cofiring ceramics (LTCC) technique wi
th a platinum heater buried inside the multilayer structure. SnO2 or S
nO2 with Pd as catalyst thick films were used as gas sensitive materia
ls. The properties of the gas sensors were measured with methane and c
arbon monoxide. The results of our study show that LTCC can be success
fully applied in sensor technology as well as confirming the correctne
ss of the sensor design. (C) 1998 Elsevier Science S.A. All rights res
erved.