SOLID-PHASE REACTIONS IN IR (111)SI SYSTEMS STUDIED BY MEANS OF X-RAY-EMISSION SPECTROSCOPY/

Authors
KURMAEV EZ GALAKHOV VR SHAMIN SN RODRIGUEZ T ALMENDRA A SANZMAUDES J GORANSSON K ENGSTROM I
Citation
Ez. Kurmaev et al., SOLID-PHASE REACTIONS IN IR (111)SI SYSTEMS STUDIED BY MEANS OF X-RAY-EMISSION SPECTROSCOPY/, Journal of materials research, 13(7), 1998, pp. 1950-1955
Citations number
12
Categorie Soggetti
Material Science
Journal title
Journal of materials research → ACNP
ISSN journal
08842914
Volume
13
Issue
7
Year of publication
1998
Pages
1950 - 1955
Database
ISI
SICI code
0884-2914(1998)13:7<1950:SRII(S>2.0.ZU;2-N
Abstract
High energy resolved x-ray emission spectroscopy with variable electro n beam excitation is applied for study of solid-phase reactions in the Ir/(lll)Si system as a function of annealing temperature. The formati on of Lr silicides as a function of depth is studied by measurements o f Si L-2,L-3 x-ray emission valence spectra at different electron exci tation energies (3-10 keV), and the results are compared with those of Rutherford backscattering.