HYBRID-ASSEMBLED MICRO DOSING SYSTEM USING SILICON-BASED MICROPUMP VALVE AND MASS-FLOW SENSOR/

This paper presents a hybrid-assembled bidirectional micro dosing syst em for a water flow range of - 40 mu l/min to 80 mu l/min. The system consists of a silicon micropump/valve chip (9 mm x 9 mm), a silicon fl ow sensor (6 mm x 12 mm) and a piezoelectric as well as an electrostat ic actuator. The technology of each component and the hybrid assembly of the whole system are described. Results of numerical simulation of the micropump/valve and the mass flow sensor are presented and compare d with experimental results. The new pulse-width-modulated control met hod for the actuator makes controlling the system easier. (C) 1998 Els evier Science S.A. All rights reserved.