JET MOLDING SYSTEM FOR REALIZATION OF 3-DIMENSIONAL MICROSTRUCTURES

We have developed a fabrication technology for realization of three-di mensional microstructures composed of different materials using excime r laser ablation and ultrafine particle (UFP) jet molding. We have nam ed this technology the jet molding system (JMS). This method enables t he production of three-dimentional microdevices composed of actuator, sensor materials (PZT), and electrodes (metal). Insert-molding and mas k-deposition methods were applied to obtain these structures. SEM obse rvation as well as density and electrical property measurements showed good pattern transfer fidelity with sufficient deposited layer qualit y (density of better than 85%, dielectric constant of deposited PZT la yer of 760). The deposition rate of PZT was much faster than that obta ined using any other deposition technique, and a PZT layer of 40 mu m of thick was formed with the desired metal electrode structure (C) 199 8 Elsevier Science S.A. All rights reserved.