CUBIC BORON-NITRIDE FILMS FORMED BY DC PLASMA CVD

Authors
WANG WL LIAO KJ GAO JY
Citation
Wl. Wang et al., CUBIC BORON-NITRIDE FILMS FORMED BY DC PLASMA CVD, Physica status solidi. a, Applied research, 139(1), 1993, pp. 25-28
Citations number
16
Categorie Soggetti
Physics, Condensed Matter
Journal title
Physica status solidi. a, Applied research → ACNP
ISSN journal
00318965
Volume
139
Issue
1
Year of publication
1993
Pages
25 - 28
Database
ISI
SICI code
0031-8965(1993)139:1<25:CBFFBD>2.0.ZU;2-A