HYDROGEN DEPTH PROFILING WITH SUB-NM RESOLUTION IN HIGH-RESOLUTION ERD

Authors
KIMURA K NAKAJIMA K IMURA H
Citation
K. Kimura et al., HYDROGEN DEPTH PROFILING WITH SUB-NM RESOLUTION IN HIGH-RESOLUTION ERD, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 140(3-4), 1998, pp. 397-401
Citations number
10
Categorie Soggetti
Instument & Instrumentation","Nuclear Sciences & Tecnology","Physics, Atomic, Molecular & Chemical","Physics, Nuclear
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
140
Issue
3-4
Year of publication
1998
Pages
397 - 401
Database
ISI
SICI code
0168-583X(1998)140:3-4<397:HDPWSR>2.0.ZU;2-3
Abstract
A depth resolution of 0.28 nm is obtained in a depth profile of hydrog en in silicon using a newly developed high-resolution elastic recoil d etection (ERD) system. The system consists of a standard 90 degrees se ctor magnetic spectrometer (energy resolution similar to 0.1%) for hig h-resolution measurement and an electrostatic deflector for blocking s cattered incident ions without disturbing the energy resolution. The s ystem is very simple as compared with other high-resolution ERD system s and the data acquisition time is reasonably short. (C) 1998 Elsevier Science B.V.