SURFACE-MICROMACHINED TA-SI-N BEAMS FOR USE IN MICROMECHANICS

Authors
GRETILLAT MA LINDER C DOMMANN A STAUFERT G DEROOIJ NF NICOLET MA
Citation
Ma. Gretillat et al., SURFACE-MICROMACHINED TA-SI-N BEAMS FOR USE IN MICROMECHANICS, Journal of micromechanics and microengineering, 8(2), 1998, pp. 88-90
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Mechanical","Instument & Instrumentation
Journal title
Journal of micromechanics and microengineering → ACNP
ISSN journal
09601317
Volume
8
Issue
2
Year of publication
1998
Pages
88 - 90
Database
ISI
SICI code
0960-1317(1998)8:2<88:STBFUI>2.0.ZU;2-4
Abstract
Realization and characterization of free-standing surface-microstructu res based on Ta-Si-N films are presented. Due to their significant phy sical and chemical properties, such ternary films are promising candid ates for application in microelectromechanical devices.