PHOTORESIST PARABOLAS FOR CURVED MICROMIRRORS

Authors
ROTICH SK SMITH JG EVANS AGR BRUNNSCHWEILER A
Citation
Sk. Rotich et al., PHOTORESIST PARABOLAS FOR CURVED MICROMIRRORS, Journal of micromechanics and microengineering, 8(2), 1998, pp. 108-110
Citations number
4
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Mechanical","Instument & Instrumentation
Journal title
Journal of micromechanics and microengineering → ACNP
ISSN journal
09601317
Volume
8
Issue
2
Year of publication
1998
Pages
108 - 110
Database
ISI
SICI code
0960-1317(1998)8:2<108:PPFCM>2.0.ZU;2-2
Abstract
Microscopic parabolic surfaces have been fabricated in thick positive photoresist by exposing it using a suitably designed mask on an X5 ste pper projection reduction system. The resulting cylindrical parabolic surfaces were coated with reflective material to form parabolic microm irrors. Measurement results of focal length are in agreement with the expected theoretical values. The devices form the basis for the fabric ation of compound parabolic microreflectors which are very suitable fo r thin solar cells.