MICROFABRICATION OF NEW SENSORS FOR SCANNING PROBE MICROSCOPY

Authors
NOELL W ABRAHAM M EHRFELD W LACHER M MAYR K
Citation
W. Noell et al., MICROFABRICATION OF NEW SENSORS FOR SCANNING PROBE MICROSCOPY, Journal of micromechanics and microengineering, 8(2), 1998, pp. 111-113
Citations number
3
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Mechanical","Instument & Instrumentation
Journal title
Journal of micromechanics and microengineering → ACNP
ISSN journal
09601317
Volume
8
Issue
2
Year of publication
1998
Pages
111 - 113
Database
ISI
SICI code
0960-1317(1998)8:2<111:MONSFS>2.0.ZU;2-G
Abstract
The paper presents a new concept of a micromachined integrated sensor for combined atomic force/near-field optical microscopy. The sensor co nsists of a microfabricated cantilever with an integrated waveguide an d a transparent near-field aperture tip. The fabrication process invol ves a novel method for the micromachining of optical near-field tips w ith an aperture diameter of 100 to 200 nm. A simple concept is introdu ced for the effective light coupling from the cantilever into the tip.