2-AXIS ELECTRODYNAMIC MICROPOSITIONING DEVICES

Highly dynamic positioning devices for small elements are an interesti ng field for microactuators. Fields of very promising application are microoptics and microbiology. Applications in microoptics are the biax ial positioning of microoptical chips, microlenses and prisms for beam shaping and deflection and in microbiology the movement of microtools for the manipulation of biological cells and microorganisms. For thes e applications two highly dynamic positioning devices are being develo ped which are capable of handling tight mechanical tolerances. The rot ors of the integrated multi-axis drives with two degrees of freedom ha ve a maximum motion range of 300 mu m. The maximum resonance frequency is over 1000 Hz. The actuators use the electrodynamic motion principl e. The technologies of wet chemical etching of silicon and galvanic ba tch processes are used. Furthermore this paper describes a method whic h can be used to predict the dynamic and static characteristics of ele ctrodynamic actuators with a few input parameters.