THE DYNAMIC MICROPUMP DRIVEN WITH A SCREEN-PRINTED PZT ACTUATOR

A hybrid actuated silicon-based micropump with dynamic passive valves is described in this paper. The actuator is based on a combination of thick-film and silicon micromachining technology and relies on the fle xure of a membrane structure of lead zirconate titanate on silicon. In let and outlet valves use the passive dynamic principle, where flow di rection is realized with a diffuser and a nozzle shaped element. Pump rates of up to 155 mu l min(-1) and a maximum backpressure of 1 kPa we re achieved at a driving voltage of 600 V-pp. Additionally the fluidic modelling of the dynamic passive valves is described, using a CFD sim ulator. The results of the model agree well with device measurements.