FUNCTIONALIZATION OF A NONEQUILIBRIUM RF INDUCTION PLASMA BY GAS-MIXTURES

Citation
H. Nishiyama et al., FUNCTIONALIZATION OF A NONEQUILIBRIUM RF INDUCTION PLASMA BY GAS-MIXTURES, JSME international journal. Series B, fluids and thermal engineering, 41(2), 1998, pp. 502-510
Citations number
16
Categorie Soggetti
Engineering, Mechanical",Thermodynamics
ISSN journal
13408054
Volume
41
Issue
2
Year of publication
1998
Pages
502 - 510
Database
ISI
SICI code
1340-8054(1998)41:2<502:FOANRI>2.0.ZU;2-B
Abstract
The present study describes the control characteristics of the gas tem perature and velocity fields and also plasma parameters of RF inductio n argon nonequilibrium plasma by injecting a premixed cold helium gas axially at atmospheric pressure. The flow and the gas temperature fiel ds and the plasma parameters in the RF induction mixed gas plasma are obtained by solving the axisymmetric turbulent 2D MHD equations taking account of the variable transport properties of gas mixtures and usin g two-temperature model coupled with 2D Maxwell's equations. The mixin g rate of a secondary injected gas is also evaluated using the species conservation equation. It is examined how the thermofluid and diffusi on characteristics, the plasma parameters and the nonequilibrium degre e in the RF induction plasma are influenced by the positions and the i nlet mass fractions of injected helium gas. Finally, the calculated ga s temperature taking account of the nonequilibrium effect shows good a greement with the previously obtained experimental data.