H. Nishiyama et al., FUNCTIONALIZATION OF A NONEQUILIBRIUM RF INDUCTION PLASMA BY GAS-MIXTURES, JSME international journal. Series B, fluids and thermal engineering, 41(2), 1998, pp. 502-510
The present study describes the control characteristics of the gas tem
perature and velocity fields and also plasma parameters of RF inductio
n argon nonequilibrium plasma by injecting a premixed cold helium gas
axially at atmospheric pressure. The flow and the gas temperature fiel
ds and the plasma parameters in the RF induction mixed gas plasma are
obtained by solving the axisymmetric turbulent 2D MHD equations taking
account of the variable transport properties of gas mixtures and usin
g two-temperature model coupled with 2D Maxwell's equations. The mixin
g rate of a secondary injected gas is also evaluated using the species
conservation equation. It is examined how the thermofluid and diffusi
on characteristics, the plasma parameters and the nonequilibrium degre
e in the RF induction plasma are influenced by the positions and the i
nlet mass fractions of injected helium gas. Finally, the calculated ga
s temperature taking account of the nonequilibrium effect shows good a
greement with the previously obtained experimental data.