COLUMNAR STRUCTURES IN POLYCRYSTALLINE THIN-FILMS DEVELOPED BY COMPETITIVE GROWTH

The formation mechanism of columnar structures is analysed by the inve stigation of texture and morphology of oxygen-contaminated aluminium t hin films. The responsible mechanism for the structure evolution is th e oxygen-induced competitive growth that results in an inhomogeneous s tructure of small-grained and V-shaped columnar morphology and in the appearance of (311) and (100) texture, The increase in the oxygen inco rporation induces competitive growth of initially formed randomly orie nted crystals due to the anisotropy of the chemical interaction of oxy gen with the different crystallographic faces. At high-oxygen contamin ation level, the growth morphology of films is changing to a lower zon e of the structure zone models, (C) 1998 Elsevier Science S.A.