H. Telintelo et P. Lippens, CONTROL OF CRYSTALLOGRAPHIC AND MAGNETIC TEXTURE IN DC-MAGNETRON SPUTTERED CO-CR ON FLEXIBLE PET SUBSTRATE, Thin solid films, 317(1-2), 1998, pp. 290-293
The paper reports on hard-magnetic thin films on flexible PET substrat
es. The total coating stack is deposited in a roll-coater by dc-magnet
ron sputtering and includes a Cr underlayer, a Co-Cr magnetic layer, a
nd an SiO2 wear-resistant layer on top. The influence of various depos
ition parameters on crystallographic and magnetic properties has been
investigated. The magnetic anisotropy direction in Co-Cr can be change
d from perpendicular to in-plane by applying a (very thin) Cr underlay
er. This in-plane anisotropy is directed in the machine direction, pro
bably due to an anisotropic magnetostriction. No clear relation betwee
n coercivity and crystallinity or grain size is observed. The coercivi
ty is mainly influenced by film thickness and substrate temperature. F
or Co-Cr without Cr underlayer, an increasing temperature results in i
ncreased coercivity and more distinct grains. For Co-Cr with Cr underl
ayer, an increasing temperature results in decreased coercivity and le
ss distinct grains. (C) 1998 Elsevier Science S.A.