THIN-FILMS APPLIED TO INTEGRATED OPTICAL POSITION-SENSITIVE DETECTORS

We have developed a linear thin film position-sensitive detector with 128 elements, based on p.i.n. a-Si:H devices. The incorporation of thi s sensor into an optical inspection camera makes possible the acquisit ion of three-dimensional information of an object, using laser triangu lation methods. The main advantages of this system, when compared with the conventional charge-coupled devices, are the low complexity of ha rdware and software used, and that the information can be continuously processed (analogic detection). In this paper, we present the most si gnificant characteristics of the singular one-dimensional thin film po sition-sensitive detectors that form part of the linear array with 128 sensors. (C) 1998 Elsevier Science S.A.