INVESTIGATION OF (100)-SILICON SAMPLES ON CYCLOTRON BEAMS WITH CHANNELING METHOD

The investigation of crystalline materials with the combined channelin g/IBA methods has been extended towards the higher energies available in the Debrecen Cyclotron Laboratory. The increase in the ion energy l eads to a narrowing of the channeling parameters (channeling dip, etc. ), so that accurate beam handling during the irradiation is essential. By using the above method, the energy dependence of the channeling pa rameters can be experimentally compared and proved. For test targets, silicon samples cut parallel with the (110) and (100) planes were used in axial channeling directions at different bombarding energies. The experimental results were compared with the theoretical curves. (C) 19 98 Elsevier Science B.V.