HIGH DUTY FACTOR NITROGEN RFQ AS A PROTOTYPE HIGH-CURRENT IMPLANTER

Authors
SCHEMPP A BECHTOLD A VORMANN H ENGELS O FIRJAHNANDERSCH A
Citation
A. Schempp et al., HIGH DUTY FACTOR NITROGEN RFQ AS A PROTOTYPE HIGH-CURRENT IMPLANTER, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 139(1-4), 1998, pp. 411-417
Citations number
8
Categorie Soggetti
Instument & Instrumentation","Nuclear Sciences & Tecnology","Physics, Atomic, Molecular & Chemical","Physics, Nuclear
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
139
Issue
1-4
Year of publication
1998
Pages
411 - 417
Database
ISI
SICI code
0168-583X(1998)139:1-4<411:HDFNRA>2.0.ZU;2-6
Abstract
High energy implanters have been proposed as surface modification faci lities for e.g. steel. We have designed and built a 1.5 MeV accelerato r for N+, working with beam currents up to 10 mA on duty factors of 25 %. This paper describes the properties of the structure and possible a pplications, and discusses problems of high duty factor operation and experimental results. (C) 1998 Elsevier Science B.V.