Waveguide-type semiconductor filters for WDM systems are key elemental
devices for photonic circuits with monolithic integration technology.
Semiconductor arrayed waveguide grating (AWG) filters are especially
attractive candidates for actual WDM systems. A polarization-independe
nt arrayed waveguide grating (AWG) filter and a temperature-insensitiv
e AWG filter on an InP substrate were developed in this study.