A general expression for the resonant contribution to a tunneling curr
ent has been obtained and analyzed in the tunneling Hamiltonian approx
imation. Two types of resonant tunneling structures are considered: st
ructures with a random impurity distribution and double-barrier struct
ures, where the resonant level results from size quantization. The eff
ect of temperature on the current-voltage curves of tunneling structur
es is discussed. The study of the effect of potential barrier profile
on the d(2)I/dV(2) line shape is of interest for experiments in inelas
tic tunneling spectroscopy. Various experimental situations where the
inelastic component of the tunneling current can become comparable to
the elastic one are discussed. (C) 1998 American Institute of Physics.