To determine the charge collection mechanism in hydrogenated microcrys
talline silicon (mu c-Si:H) solar cells, we have measured the electron
ic transport properties of mu c-Si:H by time-of-flight and by ac capac
itance and conductance on a unique 5.6 mu m thick sample. We found the
electron drift mobility mu(D) -2.8 +/- 0.2 cm(2) V-1 s(-1), thermally
activated with E-A = 0.14 +/- 0.1 eV. Evidence for field inhomogeneit
y was observed as an initial maximum of the photocurrent transients an
d as an increase of capacitance over the geometrical value. The freque
ncy dependence of the capacitance exhibits marked differences from a-S
i:H and is proposed as a tool for studying the effects of microstructu
re on electronic properties. Changes of the sample capacitance with te
mperature and illumination were observed. As a consequence of the inho
mogeneity of the material, several different activation energies were
found: 0.14 eV for electron drift mobility, 0.29 eV for ac conductivit
y, 0.4 eV for steady state dark conductivity and finally greater than
or equal to 0.8 eV for the photocapacitance relaxation. (C) 1998 Elsev
ier Science B.V. All rights reserved.