MICROCRYSTALLINE THIN METAL-OXIDE FILMS FOR OPTOELECTRONIC APPLICATIONS

We report the properties and optoelectronic applications of transparen t and conductive indium and tin oxide films prepared by the spray pyro lysis method and doped with Sn or F, respectively. The film properties have been measured using X-ray diffraction, optical and electrical ab sorption. As examples of applications we produced a set of selective o ptical detectors for different spectral regions, covering the waveleng th range from 0.25 to 1.1 mu m, based on metal oxide-semiconductor het erostructures and using different substrates such as: GaP, GaSe, AlxGa 1-xAs, GaAs and Si. The fabricated devices exhibit several features su ch as: production simplicity, high quantum efficiency, uniform sensiti vity over the entire active area and a high response speed. Finally, w e present a high quantum efficiency and solar blind monocrystalline zi nc sulphide optical sensor fabricated by spray deposition as an altern ative to the ultraviolet-enhanced SiC and GaN photodetectors and the p erformances of a solar cell. (C) 1998 Elsevier Science B.V. All rights reserved.